JPH0479420U - - Google Patents
Info
- Publication number
- JPH0479420U JPH0479420U JP12267590U JP12267590U JPH0479420U JP H0479420 U JPH0479420 U JP H0479420U JP 12267590 U JP12267590 U JP 12267590U JP 12267590 U JP12267590 U JP 12267590U JP H0479420 U JPH0479420 U JP H0479420U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vapor deposition
- chemical vapor
- electrodes
- opposing electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267590U JPH0479420U (en]) | 1990-11-22 | 1990-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267590U JPH0479420U (en]) | 1990-11-22 | 1990-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479420U true JPH0479420U (en]) | 1992-07-10 |
Family
ID=31870436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12267590U Pending JPH0479420U (en]) | 1990-11-22 | 1990-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479420U (en]) |
-
1990
- 1990-11-22 JP JP12267590U patent/JPH0479420U/ja active Pending
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